Characterization of the microlithography and mercury drop methods to generate PDI's
- J.A. Zenteno-Hernández(Author),
- F.S. Granados-Agustín(Author),
- D. Aguirre-Aguirre(Author),
- ,
- M.E. Percino-Zacarías(Author),
- P. Rosales-Quintero(Author)
- aCentro de Investigacion y de Estudios Avanzados
Research Output: Chapter in Book/Report/Conference proceeding Conference contribution
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Abstract
In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of /20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.
Publication Information
Output type
Research Output: Chapter in Book/Report/Conference proceeding Conference contribution
Original language
EnglishArticle number
107421EPages from-to (Number of pages)
Pages 55Publication milestones
- Published - 01/01/2018
Publication status
Published - 01/01/2018
Publication series
- Publication series name: Proceedings of SPIE - The International Society for Optical Engineering
ISSN (Print): 0277-786X
ISSN (Electronic): 1996-756X
Volume: 10742
ISBN (Electronic)
9781510620551External Publication IDs
- ORCID: /0000-0002-3310-5197/work/60121000
- Scopus: 85056474329
Host publication title
Optical Manufacturing and Testing XIIHost publication editors
- Ray Williamson
- Dae Wook Kim
- Rolf Rascher