Design and fabrication of a lightweight 3D first surface mirror aluminized by DC magnetron sputtering

A. M. Bautista-Hernández, B. Villalobos-Mendoza, R. Izazaga-Pérez, F. Solís-Pomar, C. D. Gutiérrez-Lazos, A. Aviles-Alvarado, F. A. Garcia-Castillo, E. G. Pérez-Tijerina, D. Aguirre-Aguirre*

*Autor correspondiente de este trabajo

Producción científicarevisión exhaustiva

Resumen

Aluminum thin films were deposited on a 3D prototype employing the direct current magnetron sputtering technique to fabricate a lightweight 3D first surface mirror. Before the aluminizing, the surface of the prototypes was evaluated with interferometry and atomic force microscope (AFM). The thin films were characterized using profilometry, UV-Vis spectroscopy, x-ray diffraction, AFM, x-ray photoelectron spectroscopy (XPS), and scanning electron microscopy. High adherence and homogeneous deposition of the aluminum’s thin films were achieved. In addition, the purity of the material was confirmed by XPS analysis.

Idioma originalEnglish
Páginas (desde-hasta)9089-9095
Número de páginas7
PublicaciónApplied Optics
Volumen62
N.º34
DOI
EstadoPublished - dic 2023

Nota bibliográfica

Publisher Copyright:
© 2023 Optica Publishing Group.

All Science Journal Classification (ASJC) codes

  • Óptica y física atómica y molecular
  • Ingeniería (miscelánea)
  • Ingeniería eléctrica y electrónica

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