TY - GEN
T1 - Characterization of the microlithography and mercury drop methods to generate PDI's
AU - Zenteno-Hernández, J.A.
AU - Granados-Agustín, F.S.
AU - Aguirre-Aguirre, D.
AU - Villalobos-Mendoza, B.
AU - Percino-Zacarías, M.E.
AU - Rosales-Quintero, P.
AU - Cornejo-Rodriguez, A.
N1 - Funding Information:
J. A. Zenteno-Hernández1*, F. S. Granados-Agustín1, D. Aguirre-Aguirre2,3, B. Villalobos-Mendoza3,4, M. E. Percino-Zacarías1, P. Rosales-Quintero1, and A. Cornejo-Rodriguez1. 1Instituto Nacional de Astrofísica, Óptica y Electrónica, Luis Enrique Erro No.1, San Andrés Cholula 72840 Tonantzintla, Puebla, México 2Instituto de Ciencias Aplicadas y Tecnología, Universidad Nacional Autónoma de México, Cd. Universitaria, Apdo. Postal 70-186, C.P. 04510 CDMX, México 3Polo Universitario de Tecnología Avanzada, Universidad Nacional Autónoma de México, Vía de la Innovación No. 410, Autopista Monterrey-Aeropuerto Km. 10, PIIT C.P. 66629 Apodaca N.L., México 4Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, Unidad Monterrey Vía del Conocimiento No. 201, Autopista Monterrey-Aeropuerto Km. 9.5, PIIT C.P. 66600 Apodaca N. L., México
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Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 2018/1/1
Y1 - 2018/1/1
N2 - In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of /20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.
AB - In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of /20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.
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U2 - 10.1117/12.2320812
DO - 10.1117/12.2320812
M3 - Conference contribution
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 55
BT - Optical Manufacturing and Testing XII
A2 - Williamson, Ray
A2 - Kim, Dae Wook
A2 - Rascher, Rolf
ER -