Modeling and simulation of infrared sensors using cantilever and bridge structures

A. Martínez-Torteya, G. Dieck-Assad, S. O. Martínez-Chapa

Research output: Contribution to conferencePaper

Abstract

Thermopiles have several advantages for working as infrared sensors and have already been used for applications in environmental monitoring and biomedical diagnostics. When designing thermopiles, it is of great importance to acknowledge the changes in the output voltage that the varying of each design variable may generate. In this work, the model of a thermopile with a bridge or cantilever structure that includes the thermocouples thickness, width and thermal conductivity, parameters not taken into account before, is developed. Choosing the thermocouples length for a thermopile with a fixed length membrane is not trivial. For the simulated structure with a membrane length of 900 nm, when varying the length of the thermocouples from 28 to 72% the length of the membrane, a difference in the output voltage of 81 μV was observed. A comparison between bridge and cantilever structures shows that the former achieves sensitivities up to 1.8 times the ones obtained with cantilever structures. © 2010 IEEE.
Original languageEnglish
Pages717-720
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2010
Externally publishedYes
EventProceedings - 2010 IEEE Electronics, Robotics and Automotive Mechanics Conference, CERMA 2010 -
Duration: 1 Dec 2010 → …

Conference

ConferenceProceedings - 2010 IEEE Electronics, Robotics and Automotive Mechanics Conference, CERMA 2010
Period1/12/10 → …

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  • Cite this

    Martínez-Torteya, A., Dieck-Assad, G., & Martínez-Chapa, S. O. (2010). Modeling and simulation of infrared sensors using cantilever and bridge structures. 717-720. Paper presented at Proceedings - 2010 IEEE Electronics, Robotics and Automotive Mechanics Conference, CERMA 2010, . https://doi.org/10.1109/CERMA.2010.82