Enhanced photocatalytic activity of TiO2-ZnO thin films deposited by dc reactive magnetron sputtering

M. Pérez-González; S. A. Tomás; J. Santoyo-Salazar; M. Morales-Luna

doi:10.1016/j.ceramint.2017.04.016

Enhanced photocatalytic activity of TiO₂-ZnO thin films deposited by dc reactive magnetron sputtering

M. Pérez-González^*, S. A. Tomás, J. Santoyo-Salazar, M. Morales-Luna

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

72 Citations (Scopus)

Abstract

The effect of deposition conditions on the photocatalytic activity of TiO₂-ZnO thin films was studied. By using a (Ti)₉₀-(Zn)₁₀ alloy target, the samples were deposited at room temperature on glass substrates by dc reactive magnetron sputtering and post-annealed in air at 500 °C. The dependence of the physical properties of the films on the O₂/Ar gas ratio and the deposition working pressure was investigated. XRD patterns showed mainly the formation of the anatase phase of TiO₂. Optical absorption measurements exhibited a blue shift of the band-gap energy with increasing working pressure. XPS spectra indicated the presence of the Ti⁴⁺ and Zn²⁺ oxidation states, which correspond to TiO₂ and ZnO, respectively. The chemical state of Ti was further analyzed by means of the modified Auger parameter, α’, which gave a value of ca. 873 eV. The photocatalytic property of the films was assessed by the degradation of a methylene blue aqueous solution. The maximum photocatalytic performance was observed for the samples deposited at 3.0 mTorr and O₂/Ar gas ratio of 10/90. These results are explained in terms of the structural, optical, and morphological properties of the films.

Original language	English
Pages (from-to)	8831-8838
Number of pages	8
Journal	Ceramics International
Volume	43
Issue number	12
DOIs	https://doi.org/10.1016/j.ceramint.2017.04.016
Publication status	Published - 15 Aug 2017
Externally published	Yes

Bibliographical note

Funding Information:
This work was supported by CONACyT (Mexico) under projects No. 168605 and 205733. Technical assistance was received from E. Ayala, A. García-Sotelo, A. Guillén, and M. Guerrero.

Publisher Copyright:
© 2017 Elsevier Ltd and Techna Group S.r.l.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.ceramint.2017.04.016

Cite this

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title = "Enhanced photocatalytic activity of TiO2-ZnO thin films deposited by dc reactive magnetron sputtering",

abstract = "The effect of deposition conditions on the photocatalytic activity of TiO2-ZnO thin films was studied. By using a (Ti)90-(Zn)10 alloy target, the samples were deposited at room temperature on glass substrates by dc reactive magnetron sputtering and post-annealed in air at 500 °C. The dependence of the physical properties of the films on the O2/Ar gas ratio and the deposition working pressure was investigated. XRD patterns showed mainly the formation of the anatase phase of TiO2. Optical absorption measurements exhibited a blue shift of the band-gap energy with increasing working pressure. XPS spectra indicated the presence of the Ti4+ and Zn2+ oxidation states, which correspond to TiO2 and ZnO, respectively. The chemical state of Ti was further analyzed by means of the modified Auger parameter, α{\textquoteright}, which gave a value of ca. 873 eV. The photocatalytic property of the films was assessed by the degradation of a methylene blue aqueous solution. The maximum photocatalytic performance was observed for the samples deposited at 3.0 mTorr and O2/Ar gas ratio of 10/90. These results are explained in terms of the structural, optical, and morphological properties of the films.",

author = "M. P{\'e}rez-Gonz{\'a}lez and Tom{\'a}s, {S. A.} and J. Santoyo-Salazar and M. Morales-Luna",

note = "Funding Information: This work was supported by CONACyT (Mexico) under projects No. 168605 and 205733. Technical assistance was received from E. Ayala, A. Garc{\'i}a-Sotelo, A. Guill{\'e}n, and M. Guerrero. Publisher Copyright: {\textcopyright} 2017 Elsevier Ltd and Techna Group S.r.l.",

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AU - Pérez-González, M.

AU - Tomás, S. A.

AU - Santoyo-Salazar, J.

AU - Morales-Luna, M.

N1 - Funding Information: This work was supported by CONACyT (Mexico) under projects No. 168605 and 205733. Technical assistance was received from E. Ayala, A. García-Sotelo, A. Guillén, and M. Guerrero. Publisher Copyright: © 2017 Elsevier Ltd and Techna Group S.r.l.

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N2 - The effect of deposition conditions on the photocatalytic activity of TiO2-ZnO thin films was studied. By using a (Ti)90-(Zn)10 alloy target, the samples were deposited at room temperature on glass substrates by dc reactive magnetron sputtering and post-annealed in air at 500 °C. The dependence of the physical properties of the films on the O2/Ar gas ratio and the deposition working pressure was investigated. XRD patterns showed mainly the formation of the anatase phase of TiO2. Optical absorption measurements exhibited a blue shift of the band-gap energy with increasing working pressure. XPS spectra indicated the presence of the Ti4+ and Zn2+ oxidation states, which correspond to TiO2 and ZnO, respectively. The chemical state of Ti was further analyzed by means of the modified Auger parameter, α’, which gave a value of ca. 873 eV. The photocatalytic property of the films was assessed by the degradation of a methylene blue aqueous solution. The maximum photocatalytic performance was observed for the samples deposited at 3.0 mTorr and O2/Ar gas ratio of 10/90. These results are explained in terms of the structural, optical, and morphological properties of the films.

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