Characterization of the microlithography and mercury drop methods to generate PDI's

J.A. Zenteno-Hernández, F.S. Granados-Agustín, D. Aguirre-Aguirre, B. Villalobos-Mendoza, M.E. Percino-Zacarías, P. Rosales-Quintero, A. Cornejo-Rodriguez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of /20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.

Original languageEnglish
Title of host publicationOptical Manufacturing and Testing XII
EditorsRay Williamson, Dae Wook Kim, Rolf Rascher
ISBN (Electronic)9781510620551
DOIs
Publication statusPublished - 1 Jan 2018
Externally publishedYes

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10742
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Fingerprint

Microlithography
Mercury
Wavefronts
Interferometer
Wave Front
Interferometers
Lithography
Diffraction
interferometers
pinholes
diffraction
Interference
interference

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Zenteno-Hernández, J. A., Granados-Agustín, F. S., Aguirre-Aguirre, D., Villalobos-Mendoza, B., Percino-Zacarías, M. E., Rosales-Quintero, P., & Cornejo-Rodriguez, A. (2018). Characterization of the microlithography and mercury drop methods to generate PDI's. In R. Williamson, D. W. Kim, & R. Rascher (Eds.), Optical Manufacturing and Testing XII [107421E] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10742). https://doi.org/10.1117/12.2320812
Zenteno-Hernández, J.A. ; Granados-Agustín, F.S. ; Aguirre-Aguirre, D. ; Villalobos-Mendoza, B. ; Percino-Zacarías, M.E. ; Rosales-Quintero, P. ; Cornejo-Rodriguez, A. / Characterization of the microlithography and mercury drop methods to generate PDI's. Optical Manufacturing and Testing XII. editor / Ray Williamson ; Dae Wook Kim ; Rolf Rascher. 2018. (Proceedings of SPIE - The International Society for Optical Engineering).
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Zenteno-Hernández, JA, Granados-Agustín, FS, Aguirre-Aguirre, D, Villalobos-Mendoza, B, Percino-Zacarías, ME, Rosales-Quintero, P & Cornejo-Rodriguez, A 2018, Characterization of the microlithography and mercury drop methods to generate PDI's. in R Williamson, DW Kim & R Rascher (eds), Optical Manufacturing and Testing XII., 107421E, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10742. https://doi.org/10.1117/12.2320812

Characterization of the microlithography and mercury drop methods to generate PDI's. / Zenteno-Hernández, J.A.; Granados-Agustín, F.S.; Aguirre-Aguirre, D.; Villalobos-Mendoza, B.; Percino-Zacarías, M.E.; Rosales-Quintero, P.; Cornejo-Rodriguez, A.

Optical Manufacturing and Testing XII. ed. / Ray Williamson; Dae Wook Kim; Rolf Rascher. 2018. 107421E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10742).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Zenteno-Hernández JA, Granados-Agustín FS, Aguirre-Aguirre D, Villalobos-Mendoza B, Percino-Zacarías ME, Rosales-Quintero P et al. Characterization of the microlithography and mercury drop methods to generate PDI's. In Williamson R, Kim DW, Rascher R, editors, Optical Manufacturing and Testing XII. 2018. 107421E. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2320812