Characterization of the microlithography and mercury drop methods to generate PDI's

J.A. Zenteno-Hernández, F.S. Granados-Agustín, D. Aguirre-Aguirre, B. Villalobos-Mendoza, M.E. Percino-Zacarías, P. Rosales-Quintero, A. Cornejo-Rodriguez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, we compare two techniques to make point-diffraction interferometers (PDI): microlithography and the mercury drop method to know with which of these the best results can be obtained. For the comparison, we used the wavefront generated by a commercial reference surface of /20 analyzing the interference pattern generated by the PDIs, we obtained information from the wavefront generated by the pinhole. Several PDIs were created and analyzed to have a statistical error information of both techniques.

Original languageEnglish
Title of host publicationOptical Manufacturing and Testing XII
EditorsRay Williamson, Dae Wook Kim, Rolf Rascher
ISBN (Electronic)9781510620551
DOIs
Publication statusPublished - 1 Jan 2018
Externally publishedYes

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10742
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Characterization of the microlithography and mercury drop methods to generate PDI's'. Together they form a unique fingerprint.

  • Cite this

    Zenteno-Hernández, J. A., Granados-Agustín, F. S., Aguirre-Aguirre, D., Villalobos-Mendoza, B., Percino-Zacarías, M. E., Rosales-Quintero, P., & Cornejo-Rodriguez, A. (2018). Characterization of the microlithography and mercury drop methods to generate PDI's. In R. Williamson, D. W. Kim, & R. Rascher (Eds.), Optical Manufacturing and Testing XII [107421E] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10742). https://doi.org/10.1117/12.2320812